Novanta advanced packaging semiconductor application

Advanced Industrial

Electronics &
Semiconductor Laser Processing

Semiconductor equipment manufacturers rely on tightly integrated laser sub-systems to meet the accuracy, throughput, and reliability demands of advanced device fabrication.

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Enabling Semiconductor Laser Processing System Performance

Semiconductor laser processing tools operate under increasing pressure to deliver higher precision, greater throughput, and tighter process windows, while supporting shrinking feature sizes and advanced materials. Equipment manufacturers must balance accuracy and speed with uptime, repeatability, and integration into tightly controlled fab environments.

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Supporting Laser Via‑Hole Drilling and Micro Machining

Applications such as laser via‑hole drilling and micro machining require precise control over laser energy delivery and beam motion to achieve consistent feature geometry across wafers and panels. Equipment builders must coordinate laser output, scan dynamics, and motion systems to maintain uniformity at high processing speeds.

Laser cutting machine in action cutting metal

Precision Beam Steering for Wafer Dicing and Laser Dicing

Wafer dicing and laser dicing processes demand accurate, repeatable beam placement across large substrates, often at high line speeds. Multi‑axis scan heads and polygon scanners play a critical role in maintaining edge quality, positional accuracy, and throughput.

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Designed for Semiconductor Tool Integration

Semiconductor equipment manufacturers must design tools that meet stringent requirements for cleanliness, reliability, and serviceability, while fitting within constrained mechanical and optical envelopes. Photonic sub-systems must integrate seamlessly with tool controls, motion stages, and factory automation.

Our advanced technologies are designed to support semiconductor machine builders developing and scaling laser‑based processing platforms, where precise energy control, deterministic beam positioning, and long‑term operational stability are critical to process consistency and tool performance.

Advantages of Semiconductor Laser Processing Enablers

The benefits of Semiconductor Laser Processing include:

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Stable laser output

Supports consistent material interaction across wafers and process steps.

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Accurate beam positioning

Enables repeatable feature placement and controlled edge definition.

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High‑speed scanning capability

Supports throughput requirements for dicing and micro machining tools.

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System‑level integration

Advanced technologies designed to align with semiconductor tool architectures.

Laser Sources Advanced Laser Additive Manufacturing
Novanta ti Series 60-100 watt CO2 laser cutting system

ti Series – 60-100 Watt CO2 Lasers

Laser Beam Steering Advanced Laser Additive Manufacturing
Novanta Versia 2-axis scan head

VERSIA 2-Axis Scan Head

Laser Beam Steering Advanced Laser Additive Manufacturing
Novanta FireFly3D laser additive manufacturing scan head

FIREFLY3D