LINEAR STAGE
nPL70Z Stage
nPL70Z Stage Linear Motor Stage
The nPL70Z is a high-performance vertical linear motor stage designed for fast, precise Z-axis positioning in demanding applications. Featuring direct-drive linear motor technology and optional magnetic or pneumatic counterbalance systems, it delivers smooth, backlash-free motion with high acceleration, rapid settling, and excellent repeatability.
With configurable motors, high-resolution encoder options, and cleanroom compatibility, the nPL70Z is ideal for automated microscopy, semiconductor inspection, precision metrology, and Z-focus applications.
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Key Features
The nPL70 stages feature a high-precision, compact design that enables seamless stacked configurations. These high-eciency stages are excellent for scanning applications that require fast acceleration and velocity control.
Multiple motor and resolution configurations, combined with a low 25mm profile, provide optimum motion control for precision scanning applications ranging from Semiconductor Fabrication to Life Sciences.
The ironless linear motor, coupled with unique windings, eliminates cogging while maintaining high force density and smooth motion. High precision anti-creep cross-roller bearings maximize stiness and minimize o-axis and angular errors.
Performance Specifications
| Attribute | nPL70Z-1M | nPL70Z-2M |
|---|---|---|
| Maximum Travel | 45 mm | 25 mm |
|
Encoder resolution |
0.01 µm 0.1 µm 1.0 µm |
0.01 µm 0.1 µm 1.0 µm |
|
Accuracy (Full Travel ISO 230) |
4 µm 6 µm 10 µm |
4 µm 6 µm 10 µm |
|
Bi-directional Repeatability (Full Travel) |
± 0.4 µm ± 0.5 µm ± 2.0 µm |
± 0.4 µm ± 0.5 µm ± 2.0 µm |
| Straightness & Flatness | 4 µm | 4 µm |
| Pitch & Yaw | 50 µrad | 50 µrad |
| Maximum Velocity (unloaded) | 1.30 m/s | 1.37 m/s |
| Normal Load Capacity | 0.8 Kg | 2.1 Kg |
| Peak Force | 11.9 N | 23.8 N |
| Continuous Force | 3.0 N | 6.0 N |
| Duty Cycle | 100% | 100% |
| Stage Material | Al | Al |
| Stage Mass | 563 gr | 588 gr |
| Moving Carriage Mass | 327 gr | 327 gr |
| Cable Length | 1 m | 1 m |
Motor Control Specifications
| Attribute | 1M | 2M |
|---|---|---|
| Motor Constant | 1.67 N/√W | 2.42 N/√W |
| Continuous Power | 3.20 W | 6.10 W |
| Peak Power | 50.90 W | 97.10 W |
| Electrical Cycle | 21.00 mm | 21.00 mm |
| Max Bus Voltage | 60.00 V | 60.00 V |
| Max Coil Temperature | 125.00 °C | 125.00 °C |
| Thermal Dissipation Constant | 0.04 W/°C | 0.08 W/°C |
| Continuous Current | 1.70 Arms | 1.70 Arms |
| Peak Current | 6.80 Arms | 6.80 Arms |
| Force Constant | 1.75 N/Arms | 3.50 N/Arms |
| Back EMF Constant | 1.40 Vpk/(m/s) | 2.90 Vpk/(m/s) |
| Inductance | 0.11 mH | 0.22 mH |
| Thermal Resistance @25 °C | 1.10 Ohms | 2.10 Ohms |
| Electrical Time Constant | 0.10 ms | 0.10 ms |
Vertical Counterbalance(CB) Type
| Attribute | CB Force | Max Travel |
|---|---|---|
| Magnetic (MV) | 3 N | 20 mm, 25 mm |
| Magnetic (HV) | 7 N | 20 mm, 25 mm |
| Pneumatic (PV) | Up to 45 N | 10/20/25/45 mm |
- Filter by Type
- Brochure
- Drawing
- STEP File
| Download | Download Type | Language |
|---|---|---|
| nPL70 Stage Product Brochure | Brochure | English |
| nPL70Z Stage Installation Drawing | Drawing | English |
| STEP File – nPL70Z-M1-(45)-MVN(20) | STEP File | English |
| STEP File – nPL70Z-M1(45)-MVN(25) | STEP File | English |
| STEP File – nPL70Z-M1(45)-PVN(10) | STEP File | English |
| STEP File – nPL70Z-M1(45)-PVN(45) | STEP File | English |
| STEP File – nPL70Z-M2(25)-MVN(20) | STEP File | English |
| STEP File – nPL70Z-M2(25)-MVN(25) | STEP File | English |
| STEP File – nPL70Z-M2(25)-PVN(10) | STEP File | English |
