PIEZO STAGE
nPFocus1000
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Key Features
- Up to 1000 µm (1 mm) closed-loop travel range for extended Z-axis motion
- Piezo-driven actuation for fast response and high-resolution positioning
- Closed-loop feedback system (capacitive or strain gauge) for improved accuracy and repeatability
- Nanometer-level resolution across a long travel range
- Smooth motion with low drift and high linearity
- Fast settling time for efficient focus adjustments and scanning
- High stiffness design for stable, precise positioning under load
- Compact, integration-ready form factor for optical and imaging systems
- Ideal for microscopy, semiconductor inspection, and photonics applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715250 |
| Footprint | 64.54mm W x 77mm D x 40mm H |
| Material | Aluminum/SS |
| Maximum Load | 0.8kg |
| Max Force (Push/Pull) | 20N/10N |
| Stage Mass | 490g |
| Nanomotion Control | Z |
| Closed-loop Travel | 1000µm |
| Open-loop Travel (-30 to 150 V) | 1150µm |
| Position Noise | 5nm |
| Stiffness | 0.1N/µm |
| Resonant Frequency | 135Hz |
| Settling Time | 25ms |
| Linearity Deviation | 0.02% |
| Capacitance | 17.8µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.400 |
