PIEZO STAGE
RXY3-276
RXY3-276 Fast, Tip-Tilt Piezo Stage
Tip/tilt piezo stages provide ultra-precise angular positioning in pitch and roll for alignment and dynamic control of mirrors, lenses, and optical components. Using piezoelectric actuation and flexure-guided mechanisms, they deliver frictionless, backlash-free motion with fast response times and nanoradian-level resolution.
Designed for high-speed beam steering, image stabilization, scanning, and real-time optical correction, these compact stages offer excellent repeatability, stability, and closed-loop accuracy. They are widely used in semiconductor inspection, photonics, free-space optical communication, and high-resolution imaging systems.
Related Products
Key Features
- 2-axis angular motion (tip and tilt) for precise optical alignment
- Piezoelectric actuation for fast response and high-resolution control
- Nanoradian-level angular resolution for ultra-fine adjustments
- Flexure-guided design for frictionless, backlash-free motion
- High-speed dynamic performance for scanning and beam steering
- Closed-loop feedback options for improved accuracy and stability
- High resonant frequency enabling rapid positioning and correction
- Compact, integration-friendly design for optical systems
- Supports mirror and optics mounting for beam control applications
- Ideal for laser steering, image stabilization, photonics, and semiconductor applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715276 |
| Footprint | 37.5mm H x 25mm ∅ |
| Material | Invar 36 or Stainless Steel |
| Maximum Load | 3 inch Mirror |
| Max Force (Push/Pull) | NA |
| Stage Mass | 90g |
| Nanomotion Control | Tip-Tilt |
| Closed-loop Travel | 3mrad |
| Open-loop Travel (-30 to 150 V) | 3.5mrad |
| Position Noise | 0.05µrad |
| Stiffness | NA |
| Resonant Frequency | 2.4 kHz Unloaded, 1.7 kHz with 25mm Ø x 8mm Mirror |
| Settling Time | 3ms |
| Linearity Deviation | 0.10% |
| Capacitance | 1.8µF |
| Integrated Sensor | Strain Gauge |
| Cable Length | 2m |
| Controller | LC.402 |
