PIEZO STAGE
nPXY 100-100
nPXY 100-100 High-precision Piezo Stage
The nPXY100-100 is a compact piezo-driven XY nanopositioning stage with 100 µm of travel in both axes and nanometer-level resolution. Its flexure-guided design provides frictionless, backlash-free motion with fast response, excellent repeatability, and minimal cross-talk for precision scanning and optical alignment applications.
With a compact footprint and high dynamic performance, it is ideal for microscopy, metrology, and positioning small optical components or samples requiring stable nanometer-scale motion.
Related Products
Key Features
- 100 µm travel per axis (X and Y) for precise 2D nanopositioning
- Piezoelectric actuation for fast response and high-resolution motion
- Nanometer to sub-nanometer resolution (~0.2–0.4 nm typical) for ultra-precise positioning
- Flexure-guided design for frictionless, backlash-free performance
- Parallel kinematics for low cross-talk and high motion accuracy
- High resonant frequency (~380–480 Hz typical) for fast scanning and dynamic applications
- Fast settling time for efficient positioning and scanning workflows
- Compact, lightweight design for easy system integration
- Closed-loop feedback options (strain gauge) for improved accuracy and repeatability
- Ideal for microscopy, metrology, photonics, and semiconductor applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715100 |
| Footprint | 100mm W x 100mm D x 23mm H |
| Diameter | NA |
| Aperture | 40mm ∅ |
| Material | Aluminum |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 460g |
| Nanomotion Control | XY |
| Closed-loop Travel | 100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 160µm|160µm |
| Position Noise | 0.3nm|0.3nm |
| Stiffness | 1.2N/µm|1.2N/µm |
| Resonant Frequency | 700Hz|700Hz |
| Settling Time | 6ms|6ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 2.4µF|2.4µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
