PIEZO STAGE
nPCube
nPCube Compact, 3-Axis Piezo Stage
The nPCube is a compact 3-axis nanopositioning stage designed for ultra-precise X, Y, and Z motion with nanometer-level resolution and high stability. Using piezoelectric actuation and closed-loop feedback, it delivers fast response, smooth motion, and excellent repeatability for high-speed scanning and precision alignment.
Its monolithic, high-stiffness design minimizes cross-axis coupling while maintaining accurate independent motion in space-constrained optical and imaging systems. The nPCube is ideal for microscopy, photonics, semiconductor inspection, and nano-scale manufacturing applications.
Related Products
Key Features
- 3-axis (XYZ) nanopositioning for simultaneous multi-directional motion
- 100 µm closed-loop travel range in X, Y, and Z axes
- Piezo-driven actuation for ultra-fast response and nanometer-level precision
- Flexure-guided design for frictionless motion, high stiffness, and minimal cross-axis error
- Sub-nanometer resolution and low positioning noise for high-precision applications
- High resonant frequency enabling fast scanning and dynamic performance
- Compact, lightweight form factor for easy integration into optical systems
- Closed-loop feedback options (e.g., capacitive sensors) for improved accuracy and repeatability
- Low cross-talk and high orthogonality between axes for precise independent motion
- Ideal for microscopy, photonics, nanolithography, and alignment applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715464 |
| Footprint | 40mm W x 40mm D x 47mm H |
| Material | Aluminum/SS |
| Maximum Load | 1.5kg |
| Max Force (Push/Pull) | 15N |
| Stage Mass | 160g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 140µm|140µm|140µm |
| Position Noise | 3nm|3nm|3nm |
| Stiffness | 0.6N/µm|0.6N/µm|0.6N/µm |
| Resonant Frequency | 280Hz|430Hz|280Hz |
| Settling Time | 20ms|20ms|20ms |
| Linearity Deviation | 0.05%|0.05%|0.05% |
| Capacitance | 1.5µF|1.5µF|1.5µF |
| Integrated Sensor | Strain Gauge |
| Cable Length | 2m |
| Controller | LC.403 |
