nPX600 Compact piezo stage

The nPX600 is a compact piezo-driven nanopositioning stage offering 600 µm of travel with sub-nanometer resolution for high-precision motion and scanning applications. Its flexure-guided design provides frictionless, backlash-free motion with fast response, high repeatability, and excellent stability.

Compact and robust, the nPX600 supports loads up to approximately 1 kg, making it ideal for semiconductor inspection, microscopy, optical alignment, nanofabrication, and precision measurement systems.

View all features

nPFocus100 piezo Z‑axis focus stage on white background

Documents & Downloads

Key Features

600 µm closed-loop travel range for extended nanopositioning capability
Sub-nanometer resolution (~2 nm noise typical) for ultra-precise motion
Piezoelectric actuation for fast response and high-speed positioning
Flexure-guided design for frictionless, backlash-free operation
High load capacity (~1 kg) for versatile application support
High stiffness and stability for accurate, repeatable performance
Fast settling time (~25 ms typical) for efficient positioning
Compact footprint (~60 × 60 × 15 mm) for easy system integration
Closed-loop feedback (capacitive sensor) for improved linearity and accuracy
Ideal for semiconductor, photonics, microscopy, and precision metrology applications

Speak to our experts

Specifications

Attribute	Value
Part Number	3715505
Footprint	72mm W x 76mm D x 18mm H
Material	Stainless Steel
Maximum Load	300g
Max Force (Push/Pull)	50N/20N
Stage Mass	560
Nanomotion Control	X
Closed-loop Travel	600µm
Open-loop Travel (-30 to 150 V)	700µm
Position Noise	3nm
Stiffness	0.4N/µm
Resonant Frequency	165Hz
Settling Time	25ms
Linearity Deviation	0.01%
Capacitance	6.5µF
Integrated Sensor	Capacitive
Cable Length	2m
Controller	LC.400

Download	Download Type	Language
nPX600 Installation Drawing	Drawing	English
nPX600 STEP File	STEP File	English

nPX600