LINEAR STAGE
nPL70S Stage
nPL70S Stage Linear Motor Stage
The nPL70S is a compact direct-drive linear motor stage designed for fast, smooth, and highly precise positioning in space-constrained systems. Using ironless linear motor technology and cross-roller bearings, it delivers backlash-free motion, rapid acceleration, fast settling, and excellent repeatability.
With configurable motor and encoder options, the nPL70S is ideal for high-speed scanning, precision alignment, and advanced automation applications requiring compact size and high dynamic performance.
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Key Features
The nPL70 stages feature a high-precision, compact design that enables seamless stacked configurations. These high-eciency stages are excellent for scanning applications that require fast acceleration and velocity control.
Multiple motor and resolution configurations, combined with a low 25mm profile, provide optimum motion control for precision scanning applications ranging from Semiconductor Fabrication to Life Sciences.
The ironless linear motor, coupled with unique windings, eliminates cogging while maintaining high force density and smooth motion. High precision anti-creep cross-roller bearings maximize stiness and minimize o-axis and angular errors.
Performance Specifications
| Attribute | nPL70S-1M | nPL70S-2M |
|---|---|---|
| Maximum Travel | 45 mm | 25 mm |
|
Encoder resolution |
0.01 µm 0.1 µm 1.0 µm |
0.01 µm 0.1 µm 1.0 µm |
|
Accuracy (Full Travel ISO 230) |
4 µm 6 µm 10 µm |
4 µm 6 µm 10 µm |
|
Bi-directional Repeatability (Full Travel) |
± 0.4 µm ± 0.5 µm ± 2.0 µm |
± 0.4 µm ± 0.5 µm ± 2.0 µm |
| Straightness & Flatness | 4 µm | 4 µm |
| Pitch & Yaw | 50 µrad | 50 µrad |
| Maximum Velocity (unloaded) | 1.30 m/s | 1.37 m/s |
| Normal Load Capacity | 10 Kg | 10 Kg |
| Peak Force | 11.9 N | 23.8 N |
| Continuous Force | 3.0 N | 6.0 N |
| Duty Cycle | 100% | 100% |
| Stage Material | Al | Al |
| Stage Mass | 563 gr | 588 gr |
| Moving Carriage Mass | 327 gr | 327 gr |
| Cable Length | 1 m | 1 m |
Motor Control Specifications
| Attribute | 1M | 2M |
|---|---|---|
| Motor Constant | 1.67 N/√W | 2.42 N/√W |
| Continuous Power | 3.20 W | 6.10 W |
| Peak Power | 50.90 W | 97.10 W |
| Electrical Cycle | 21.00 mm | 21.00 mm |
| Max Bus Voltage | 60.00 V | 60.00 V |
| Max Coil Temperature | 125.00 °C | 125.00 °C |
| Thermal Dissipation Constant | 0.04 W/°C | 0.08 W/°C |
| Continuous Current | 1.70 Arms | 1.70 Arms |
| Peak Current | 6.80 Arms | 6.80 Arms |
| Force Constant | 1.75 N/Arms | 3.50 N/Arms |
| Back EMF Constant | 1.40 Vpk/(m/s) | 2.90 Vpk/(m/s) |
| Inductance | 0.11 mH | 0.22 mH |
| Thermal Resistance @25 °C | 1.10 Ohms | 2.10 Ohms |
| Electrical Time Constant | 0.10 ms | 0.10 ms |
