PIEZO STAGE
nPX300
nPX300 Compact piezo stage
The nPX300 is a compact piezo-driven nanopositioning stage offering 300 µm of travel with sub-nanometer resolution for high-precision motion and scanning applications. Its flexure-guided design provides frictionless, backlash-free motion with fast response, smooth operation, and excellent repeatability.
With a compact, high-stiffness structure, the nPX300 is ideal for microscopy, photonics alignment, semiconductor inspection, and nano-scale manufacturing applications requiring stable and accurate motion control.
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Key Features
- 300 µm travel range for extended nanopositioning capability
- Sub-nanometer resolution for ultra-precise positioning
- Piezoelectric actuation for fast response and smooth motion
- Flexure-guided design for frictionless, backlash-free movement
- High stiffness and stability for accurate, repeatable performance
- Compact footprint for easy integration into optical and precision systems
- Low hysteresis and high linearity with closed-loop control options
- Ideal for microscopy, photonics, semiconductor, and nano-positioning applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715507 |
| Footprint | 55mm W x 52mm D x 16mm H |
| Material | Stainless Steel |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 230g |
| Nanomotion Control | X |
| Closed-loop Travel | 300µm |
| Open-loop Travel (-30 to 150 V) | 360µm |
| Position Noise | 0.8nm |
| Stiffness | 0.14N/µm |
| Resonant Frequency | 230Hz |
| Settling Time | 10ms |
| Linearity Deviation | 0.01% |
| Capacitance | 2.7µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.400 |
