nPXY200Z100-271 Large Aperture 3-Axis Piezo Stage

The nPXY200Z100-271 is a large-aperture 3-axis piezo nanopositioning stage providing ultra-precise X, Y, and Z motion with travel ranges of 200 µm in X/Y and 100 µm in Z. Its flexure-guided, parallel kinematic design delivers frictionless, backlash-free motion with minimal cross-axis coupling, fast response, and high repeatability.

Integrated closed-loop feedback ensures excellent positioning accuracy and stability, while the large central aperture supports optical beam paths and microscopy access. Ideal applications include scanning probe microscopy, optical metrology, nanofabrication, and advanced materials research.

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Key Features

XYZ nanopositioning (3-axis motion) for full 3D precision control
Travel range: 200 µm (X/Y), 100 µm (Z) for extended multi-axis positioning
Large central aperture (~68 × 68 mm) for optical access and microscopy integration
Piezoelectric actuation for fast response and nanometer-level resolution
Flexure-guided design for frictionless, backlash-free motion and high reliability
Parallel kinematics for low cross-talk and high orthogonality between axes
High load capacity (~5 kg) for accommodating larger samples or components
Sub-nanometer positioning noise (~0.3–0.7 nm typical) for ultra-stable performance
Fast settling time (~10–15 ms) for dynamic scanning applications
Ideal for scanning probe microscopy, optical imaging, nanofabrication, and metrology

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Specifications

Attribute	Value
Part Number	3715271
Footprint	140mm W x 140mm D x 38mm H
Diameter	NA
Aperture	68mm W x 68mm D
Material	Aluminum
Maximum Load	5kg
Max Force (Push/Pull)	100N/20N
Stage Mass	990g
Nanomotion Control	XYZ
Closed-loop Travel	200µm\|200µm\|100µm
Open-loop Travel (-30 to 150 V)	240µm\|240µm\|135µm
Position Noise	0.7nm\|0.7nm\|0.3nm
Stiffness	1.5N/µm\|2.0N/µm\|5.6N/µm
Resonant Frequency	350Hz\|350Hz\|450Hz
Settling Time	15ms\|15ms\|10ms
Linearity Deviation	0.01%\|0.01%\|0.02%
Capacitance	7.5µF\|7.5µF\|5.5µF
Integrated Sensor	Capacitive
Cable Length	2m
Controller	LC.403

Download	Download Type	Language
nPXY200Z100-271 Installation Drawing	Drawing	English
nPXY200Z100-271 STEP File	STEP File	English

nPXY200Z100-271