PIEZO STAGE
nPXY200-101
nPXY200-101 High-precision Piezo Stage
The nPXY100-100 is a high-precision piezo-driven XY nanopositioning stage with 100 µm of travel in both axes and nanometer-level resolution. Its flexure-guided, parallel kinematic design delivers frictionless, backlash-free motion with minimal cross-talk, high repeatability, and fast dynamic response.
Compact and stable, it is ideal for microscopy, metrology, optical alignment, semiconductor processing, and high-speed precision scanning applications.
Related Products
Key Features
- 100 µm travel per axis (X and Y) for precise 2D nanopositioning
- Piezoelectric actuation for fast response and high-resolution motion
- Flexure-guided design for frictionless, backlash-free performance
- Parallel kinematic structure for low cross-talk and high orthogonality
- Nanometer to sub-nanometer resolution for ultra-precise positioning
- High resonant frequency enabling fast scanning and dynamic applications
- Compact, lightweight design for easy integration into optical systems
- Closed-loop feedback options available for improved accuracy and stability
- Ideal for metrology, microscopy, photonics, and semiconductor applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715101 |
| Footprint | 100mm W x 100mm D x 23mm H |
| Diameter | NA |
| Aperture | 40mm ∅ |
| Material | Aluminum |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 460g |
| Nanomotion Control | XY |
| Closed-loop Travel | 200µm|200µm |
| Open-loop Travel (-30 to 150 V) | 290µm|290µm |
| Position Noise | 0.5nm|0.5nm |
| Stiffness | 0.5N/µm|0.5N/µm |
| Resonant Frequency | 400Hz|400Hz |
| Settling Time | 15ms|15ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 3.1µF|3.1µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
