Piezo Solutions
3-Axis Piezo Stages
3-axis piezo stages deliver ultra-precise X, Y, and Z nanopositioning with nanometer-level resolution. Using piezoelectric actuation and flexure guidance, they provide smooth, backlash-free motion with high stability, fast response, and exceptional repeatability, enabling accurate 3D positioning for advanced precision applications.
3-Axis Piezo Stages
3-axis piezo stages provide ultra-precise X, Y, and Z nanopositioning for advanced scanning, alignment, and imaging applications requiring full three-dimensional motion control.
- Simultaneous X, Y, and Z motion with nanometer and sub-nanometer resolution
- Piezoelectric actuation with flexure-guided, frictionless motion
- Backlash-free operation with high stability and repeatability
- Fast dynamic response for high-speed scanning and positioning
- Precise 3D control for microscopy, photonics, and semiconductor inspection
- Ideal for advanced imaging, alignment, and nano-scale positioning applications
Explore Our 3-Axis Piezo Stages
3-Axis Piezo Stage Solutions
nPCube
A compact 3-axis piezo stage that enables precise XYZ nanopositioning with nanometer-level resolution, offering high stability and fast response in a space-efficient design.
nPXY200Z100-271
A high-performance 3-axis piezo stage that combines precise XY motion with integrated Z-axis control, delivering nanometer-level accuracy, fast response, and stable positioning for advanced 3D nanopositioning applications.
3-Axis Piezo Quick Compare
nPCube
nPXY200Z100-271
Travel range
Compact XYZ piezo stage
200 µm XY / 100 µm Z
Max force (push/pull)
50N / 10N
100N / 20N
Resonant frequency
High dynamic response
300 Hz
Settling time
Fast response
20 ms
Position Noise
Sub-nm
0.5 nm
Bi-directional Repeatability (Full Travel)
±0.01% F.S.
±0.01% F.S.
Straightness & Flatness
<1 µm
<1 µm
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Explore how Piezo Stages can streamline your workflows. Novanta has the right technology and Engineering team for your solution.
Explore Our Featured Applications
3-Axis Piezo Solutions
Surgical Imaging
Surgical imaging uses advanced visualization technologies to provide real-time, high-resolution views during medical procedures, enhancing precision, guidance, and patient outcomes.
Microscopy
Microscopy involves the use of specialized instruments to visualize and analyze structures at micro- and nanoscale resolutions beyond the limits of the human eye.
Features 3-Axis Piezo Stages
3-Axis Nanopositioning
Fast, High Bandwidth
Stable Flexure Design
3D Scanning and Alignment
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