PIEZO STAGE
nPFocus400
nPFocus400 Piezo Z focus stage
The nPFocus400 is a piezo-driven Z-axis nanopositioning stage providing 400 µm of travel for precision focus control in microscopy and optical imaging systems. Using piezo actuation with closed-loop capacitive or strain gauge feedback, it delivers smooth, high-speed motion with excellent accuracy, repeatability, and minimal drift.
Its compact, high-stiffness design makes it ideal for semiconductor inspection, photonics alignment, and advanced microscopy applications requiring stable nanometer-scale focus positioning.
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Key Features
- 400 µm closed-loop travel range for extended Z-axis positioning
- Piezoelectric actuation for fast response and high-resolution motion
- Closed-loop feedback options (capacitive or strain gauge sensors) for improved accuracy
- Nanometer-level resolution with low positioning noise (~2.5–7 nm typical)
- Smooth, repeatable motion with high linearity
- Fast settling time (~20 ms typical) for efficient focus adjustments
- High stiffness and low vibration for stable imaging performance
- Compact, integration-ready design for optical and microscopy systems
- Supports microscope objective mounting for direct focus control
- Ideal for microscopy, photonics, and semiconductor applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715475 / 3715485 |
| Footprint | 65.2mm W 53.5mm D x 47.0mm H |
| Material | Stainless Steel |
| Maximum Load | 0.5kg |
| Max Force (Push/Pull) | 100N/10N |
| Stage Mass | 270g |
| Nanomotion Control | Z |
| Closed-loop Travel | 400µm |
| Open-loop Travel (-30 to 150 V) | 470µm |
| Position Noise | 2.5nm / 7nm |
| Stiffness | 0.2N/µm |
| Resonant Frequency | 120Hz (with 120g load) |
| Settling Time | 20ms (with 120g load) |
| Linearity Deviation | 0.01% / 0.02% |
| Capacitance | 3.8µF |
| Integrated Sensor | Capacitive / Strain Gauge |
| Cable Length | 2m |
| Controller | LC.400 |
