PIEZO STAGE
nPXY50-286
nPXY50-286 High-precision Piezo Stage
The nPXY50-286 is a compact piezo-driven XY nanopositioning stage with 50 µm of travel in both axes and sub-nanometer resolution for high-speed precision scanning. Its flexure-guided design delivers frictionless, backlash-free motion with fast settling, high repeatability, and excellent stability.
With a compact footprint, integrated aperture, and closed-loop capacitive feedback, it is ideal for microscopy, semiconductor inspection, optical research, and precision metrology applications.
Related Products
Key Features
- 50 µm travel per axis (X and Y) for precise 2D nanopositioning
- Sub-nanometer resolution (~0.2 nm noise) for ultra-precise motion
- Piezoelectric actuation for fast response and high-speed scanning
- Flexure-guided design for frictionless, backlash-free performance
- High resonant frequency (~1400 Hz) for dynamic applications
- Fast settling time (~4 ms) for rapid positioning
- Compact footprint (~60 × 60 × 25 mm) for easy integration
- Integrated central aperture (~20 mm) for optical access
- Closed-loop feedback (capacitive sensor) for improved accuracy and stability
- Ideal for AFM, microscopy, photonics, and nanotechnology applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715286 |
| Footprint | 60mm W X 60mm D X 25mm H |
| Diameter | NA |
| Aperture | 20 mm diameter |
| Material | Stainless Steel |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 380g |
| Nanomotion Control | XY |
| Closed-loop Travel | 50µm|50µm |
| Open-loop Travel (-30 to 150 V) | 70µm|70µm |
| Position Noise | 0.2nm|0.2nm |
| Stiffness | 8.0N/µm|8.0N/µm |
| Resonant Frequency | 1400Hz|1400Hz |
| Settling Time | 4ms|4ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 2.8µF|2.8µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
