Z-Focus Stages
Z-Focus stages provide precise, repeatable motion for accurate focus control in high-performance optical and imaging systems.
- Precise and repeatable positioning along the optical axis
- Smooth motion with fast response and high stability
- Supports rapid scanning and step-and-settle positioning
- Available in piezo, linear motor, and screw-driven configurations
- Adaptable for varying travel ranges, speeds, and load capacities
- Maintains consistent focus across changing sample heights
- Ideal for microscopy, semiconductor inspection, optical metrology, life sciences, and automated inspection systems
Explore Our Z-Focus Solutions
nPFocus100
A compact, high-speed piezo Z-stage designed for precise focus control, delivering nanometer-level positioning accuracy and rapid response for dynamic imaging and alignment applications.
nPFocus1000
A high-force, long-travel piezo Z-stage designed for precise focus control, offering nanometer-level resolution and stable, high-speed positioning for demanding optical and imaging systems.
nPFocus250
A compact piezo Z-stage that provides fast, precise focus control with nanometer-level resolution, balancing travel range and responsiveness for high-performance positioning applications.
nPFocus400
A high-performance piezo Z-stage designed for fast, stable focus control, delivering nanometer-level precision with increased travel range to support demanding high-resolution positioning tasks.
nPS35 Stage
The nPS35 is an ultra-compact precision stage designed for applications requiring high stiffness and smooth, controlled motion in a minimal footprint. Featuring cross-roller bearings and available in both lead screw and ball screw configurations, it offers flexibility for either cost-sensitive, self-locking vertical setups or higher-speed, higher-efficiency applications, with seamless integration into multi-axis systems when paired with piezo stages.
nPS70 Stage
The nPS70 is a compact precision stage built on a 70 mm platform, designed to deliver smooth, stable motion with high stiffness using cross-roller bearings. Available in both lead screw and ball screw configurations, it offers flexibility for either self-locking vertical applications or higher-speed, higher-efficiency motion, while enabling multi-axis integration for precision alignment and scanning tasks.
nPL70Z Stage
A vertically optimized variant with integrated counterbalance options, specifically designed to maintain stability and performance in Z-axis applications where gravity effects must be managed.
Z-Focus Quick Compare
nPFocus100
nPFocus1000
nPFocus250
nPFocus400
nPL70Z
nPS35
nPS70
Travel range
100 µm
1000 µm
250 µm
400 µm
70 µm
35 µm
70 µm
Max force (push/pull)
50N / 10N
100N / 10N
50N / 10N
100N / 10N
High stiffness
High stiffness
High stiffness
Resonant frequency
160 Hz
60 Hz
155 Hz
120 Hz
High
Very high
High
Settling time
14 ms
35 ms
15 ms
20 ms
Fast
Fast
Fast
Position Noise
3 nm
15 nm
5 nm
7 nm
Sub-nm
Sub-nm
Sub-nm
Bi-directional Repeatability (Full Travel)
±0.02% F.S.
±25 nm
±0.02% F.S.
±0.02% F.S
±0.03% F.S.
±0.02% F.S.
±0.02% F.S.
Straightness & Flatness
<1 µm
±10 µm
<1 µm
<2 µm
<2 µm
<1 µm
<1.5 µm
Speak to an Engineer
Explore how Z Focus Stages can streamline your workflows. Novanta has the right technology and Engineering team for your solution.
Explore Our Featured Applications
Z Focus Stage Solutions
Laboratory Automation
Lab automation uses advanced instrumentation and motion systems to streamline and standardize experimental workflows, improving accuracy, throughput, and repeatability in research and diagnostic environments.
Semiconductor
Semiconductor manufacturing relies on ultra-precise motion and automation systems to enable high-speed, nanoscale fabrication, inspection, and alignment of integrated circuits.
Features of Z Focus Stages

Precision Z Control

Fast Response

Multiple Technologies

Imaging Applications
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