PIEZO STAGE
nPZ710
nPZ710 High-precision piezo stage
The nPZ25-206 is a compact, single-axis piezo-driven Z-stage designed for ultra-precise vertical nanopositioning. With a 25 µm closed-loop travel range, it delivers sub-nanometer resolution and exceptional stability, making it ideal for high-resolution applications such as scanning probe microscopy, optical alignment, and precision measurement.
Built with a flexure-guided mechanism and piezoelectric actuation, the stage provides frictionless, backlash-free motion with extremely fast response. Its high resonant frequency and rapid settling time enable high-speed scanning and dynamic positioning, while integrated capacitive feedback ensures excellent linearity, repeatability, and minimal drift.
Constructed from thermally stable materials such as Super Invar, the nPZ25-206 offers outstanding thermal stability and mechanical stiffness in a compact cylindrical form factor. This combination of speed, precision, and stability makes it well-suited for demanding nanotechnology, metrology, and research environments where even the smallest positioning errors matter.
Key Features
- 25 µm closed-loop travel range for precise Z-axis nanopositioning
- Sub-nanometer resolution (~0.1 nm noise) for ultra-high precision
- Piezoelectric actuation for fast response and smooth motion
- Flexure-guided design for frictionless, backlash-free performance
- High resonant frequency (~3–4 kHz) for dynamic scanning applications
- Fast settling time (~2 ms) for rapid positioning
- High stiffness (~20 N/µm) for stable and accurate motion
- Thermally stable Super Invar construction for reduced drift
- Compact cylindrical form factor (~20 mm diameter) for easy integration
- Closed-loop capacitive sensor for high linearity and repeatability
- Ideal for AFM, nanotechnology, metrology, and optical alignment applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715206 |
| Footprint | 44mm H x 20mm u2205 |
| Material | Super Invar |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 90g |
| Nanomotion Control | Z |
| Closed-loop Travel | 25µm |
| Open-loop Travel (-30 to 150 V) | 40µm |
| Position Noise | 0.1nm |
| Stiffness | 20.0N/µm |
| Resonant Frequency | 4000Hz |
| Settling Time | 2ms |
| Linearity Deviation | 0.01% |
| Capacitance | 1.6µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.400 |
