PIEZO STAGE
nPXY 100-126
Related Products
Key Features
- 100 µm travel per axis (X and Y) for precise 2D nanopositioning
- Piezoelectric actuation for fast response and high-resolution motion
- Low-profile, large aperture design for optical and microscopy applications
- Flexure-guided structure for frictionless, backlash-free performance
- Sub-nanometer positioning capability for ultra-precise adjustments
- High stiffness and stability for accurate, repeatable motion
- Fast settling and high dynamic response for scanning applications
- Compact, integration-friendly footprint for space-constrained systems
- Minimal cross-talk between axes for accurate independent motion
- Ideal for microscopy, photonics, metrology, and semiconductor applications
Specifications
| Attribute | Value |
|---|---|
| Part Number | 3715126 |
| Footprint | 140mm W x 140mm D x 17mm H |
| Diameter | NA |
| Aperture | 68mm W x 68 mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 550g |
| Nanomotion Control | XY |
| Closed-loop Travel | 100µm|100µm |
| Open-loop Travel (-30 to 150 V) | 160µm|160µm |
| Position Noise | 0.3nm|0.3nm |
| Stiffness | 3.3N/µm|3.3N/µm |
| Resonant Frequency | 850Hz|850Hz |
| Settling Time | 5ms|5ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 4.8µF|4.8µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
