Piezo Solutions
1-Axis Piezo Stages
1-axis piezo stages provide ultra-precise, high-speed motion using piezoelectric actuation for nanometer and sub-nanometer positioning accuracy. Their flexure-based design ensures smooth, frictionless movement with no backlash or wear, delivering exceptional stability and repeatability. With fast response times and options for closed-loop control, these stages enable highly accurate and reliable single-axis positioning.
1-Axis Piezo Stages
1-axis piezo stages are engineered for ultra-precision nanopositioning, delivering motion with nanometer and sub-nanometer resolution through advanced piezoelectric actuation. Utilizing flexure-based guidance, these stages provide completely frictionless and backlash-free movement, resulting in exceptional smoothness, high stiffness, and outstanding repeatability over long periods of operation.
Their fast response times and high bandwidth enable rapid, highly controlled positioning, while closed-loop feedback options with integrated sensors ensure precise accuracy and stability under varying conditions. Compact and highly reliable, these stages are well suited for applications such as high-resolution microscopy, optical alignment, semiconductor inspection, and precision metrology, where even the smallest positional errors can impact performance.
Explore Our 1-Axis Piezo Stages
1-Axis Piezo Stage Solutions
nPFocus100
A compact, high-speed piezo Z-stage designed for precise focus control, delivering nanometer-level positioning accuracy and rapid response for dynamic imaging and alignment applications.
nPFocus1000
A high-force, long-travel piezo Z-stage designed for precise focus control, offering nanometer-level resolution and stable, high-speed positioning for demanding optical and imaging systems.
nPFocus250
A compact piezo Z-stage that provides fast, precise focus control with nanometer-level resolution, balancing travel range and responsiveness for high-performance positioning applications.
nPFocus400
A high-performance piezo Z-stage designed for fast, stable focus control, delivering nanometer-level precision with increased travel range to support demanding high-resolution positioning tasks.
nPX300
A high-precision piezo flexure stage designed for fast, multi-axis nanopositioning, offering nanometer-level accuracy, high stiffness, and exceptional stability for advanced motion control applications.
nPX600
A high-performance piezo flexure stage designed for larger travel ranges and multi-axis nanopositioning, delivering nanometer-level precision, high load capacity, and excellent stability for demanding precision motion applications.
nPZ710
A compact piezo Z-stage designed for ultra-precise vertical positioning, delivering nanometer-level resolution, fast response, and high stability for fine focus and alignment applications.
1-Axis Piezo Quick Compare
nPFocus100
nPFocus1000
nPFocus250
nPFocus400
nPX300
nPx600
nPZ710
Travel range
100 µm
1000 µm
250 µm
400 µm
300 µm (Closed-loop)
600 µm (Closed-loop)
710 µm
Max force (push/pull)
50N / 10N
100N / 10N
50N / 10N
100N / 10N
100N / 20N
100N / 20N
100N / 10N
Resonant frequency
160 Hz
60 Hz
155 Hz
120 Hz
400 Hz
250 Hz
95 Hz
Settling time
14 ms
35 ms
15 ms
20 ms
15 ms
20 ms
35 ms
Position Noise
3 nm
15 nm
5 nm
7 nm
0.5 nm
1 nm
8 nm
Bi-directional Repeatability (Full Travel)
±0.02% F.S.
±25 nm
±0.02% F.S.
±0.02% F.S
±0.01% F.S.
±0.01% F.S.
±0.02% F.S.
Straightness & Flatness
<1 µm
±10 µm
<1 µm
<2 µm
<1 µm
<1.5 µm
<2 µm
Explore Our Featured Applications
1-Axis Piezo Solutions
Microscopy Solutions
Advanced imaging, vision processing, motion, display, and data capture technologies engineered for minimally invasive and robotic surgical environments.
Semiconductor
Semiconductor manufacturing relies on ultra-precise motion and automation systems to enable high-speed, nanoscale fabrication, inspection, and alignment of integrated circuits.
Speak to an Engineer
Explore how 1-Axis Piezo Solutions can streamline your workflows. Novanta has the right technology and Engineering team for your solution.
Features of 1-Axis Piezo Stages
Nanometer Precision
Fast, Smooth Motion
Stable Flexure Design
Advanced Applications
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